Specification
| Field of View | Accuracy (1) | Repeatability (1) | Piece Size on Z Axis | Fixed Stage |
|---|---|---|---|---|
| 95 x 65 mm High Resolution for small and medium components | (5+0.01L [mm]) [μm] | (2+0.01L [mm]) [μm] | 100 mm | METRIOS |
| 23 x 23 mm Highest Resolution of the range. Capture the smallest detail on micro-components. | (2.5+0.01L [mm]) [μm] | (1.5+0.01L [mm]) [μm] | 100 mm | METRIOS HD |
(1) ±2 σ at temperatures of +20 ± 1,0°C on clean and rectified surfaces. L = measured
