|Field of View||Accuracy (1)||Repeatability (1)||Piece Size on Z Axis||Fixed Stage|
|95 x 65 mm|
High Resolution for small and medium components
|(5+0.01L [mm]) [μm]||(2+0.01L [mm]) [μm]||100 mm||METRIOS|
|23 x 23 mm|
Highest Resolution of the range. Capture the smallest detail on micro-components.
|(2.5+0.01L [mm]) [μm]||(1.5+0.01L [mm]) [μm]||100 mm||METRIOS HD|
(1) ±2 σ at temperatures of +20 ± 1,0°C on clean and rectified surfaces. L = measured