Specification
| Field of View | Accuracy (1) | Repeatability(1) | Piece Size on Z Axis | Sliding Stage |
|---|---|---|---|---|
| 265 x 200 mm Sliding Stage along the X and Y axis, wide working area and high resolution across the entire field of view | (5+0.01L [mm]) [μm] (7+0.01L [mm]) [μm] | (2+0.01L [mm]) [μm] (3+0.01L [mm]) [μm] | 80 mm | METRIOS CROSS |
| 70 x 70 mm Highest Resolution of the range. Sliding stage along X and Y axis | (2.5+0.01L [mm]) [μm] (3.5+0.01L [mm]) [μm] | (1.5+0.01L [mm]) [μm] (2.5+0.01L [mm]) [μm] | 80 mm | METRIOS HD CROSS |
(1) ±2 σ at temperatures of +20 ± 1,0°C on clean and rectified surfaces. L = measured length.
(2) Acquisition on a fixed stage.
(3) Acquisition on a moving stage.
