Specification
| Machine Models | Measurement Volume (mm) | XY Accuracy (μm) | Stage Capacity (kg) | Machine Dimensions (mm) | Machine Weight (kg) | X Max Speed | Y Max Speed | Z Max Speed | Linear Resolution |
|---|---|---|---|---|---|---|---|---|---|
| Excel 511 | 420 × 520 × 160 | 2.7+L/200 1, 2, 3 | 100 | 1295 × 1221 × 1629 | 732 | 500 mm/s | 500 mm/s | 250 mm/s | 0.05 μm |
| Excel 512 | 420 × 520 × 250 | 3.0+L/200 1, 2, 3 | 1295 × 1221 × 1803 | 739 | |||||
| Excel 701 | 660 × 700 × 160 | 1525 × 1607 × 1647 | 1611 | ||||||
| Excel 702 | 660 × 700 × 250 | 3.2+L/200 1, 2, 3 | 1525 × 1607 × 1819 | 1613 | |||||
| Excel 704 | 660 × 700 × 400 | 3.8+L/200 1, 2, 3 | 1525 × 1607 × 2119 | 1615 | |||||
| Excel 901 | 750 × 900 × 160 | 3.7+L/200 1, 2, 3 | 1625 × 1808 × 1647 | 2630 | |||||
| Excel 902 | 750 × 900 × 250 | 4.0+L/200 1, 2, 3 | 1625 × 1808 × 1819 | 2644 | |||||
| Excel 904 | 750 × 900 × 400 | 4.6+L/200 1, 2, 3 | 1625 × 1808 × 2119 | 2655 | |||||
| Excel 1301 | 1050 × 1300 × 160 | 3.7+L/200 1, 2, 3 | 1925 × 2208 × 1647 | 3085 | |||||
| Excel 1302 | 1050 × 1300 × 250 | 4.0+L/200 1, 2, 3 | 1925 × 2208 × 1819 | 3096 | |||||
| Excel 1304 | 1050 × 1300 × 400 | 4.6+L/200 1, 2, 3 | 1925 × 2208 × 2119 | 3108 | |||||
| Excel 1701 | 1250 × 1700 × 160 | 3.7+L/200 1, 2, 3 | 2125 × 2608 × 1647 | 3492 | |||||
| Excel 1702 | 1250 × 1700 × 250 | 4.0+L/200 1, 2, 3 | 2125 × 2608 × 1819 | 3504 | |||||
| Excel 1704 | 1250 × 1700 × 400 | 4.6+L/200 1, 2, 3 | 2125 × 2608 × 2119 | 3515 | |||||
| Excel 2500 | 1600 × 2520 × 160 | 4.9+L/200 1, 2, 3 | 2470 × 3470 × 1676 | 6804 |
Stage capacity is based on an evenly distributed load.
1 Within operating temperature of 20.0℃ ± 1℃ at the focal point position.
2 L is in mm.
3 Using Micro-Vu Calibration Artifact
