Specification
| Measurement Capacity | XY Accuracy | Measurement Range | Machine Dimensions Stage Weight Capacity | Machine Dimensions Stage Weight Capacity | |
|---|---|---|---|---|---|
| 69.3 x 49.6 mm | At Calibration Plane | 5.0 µm 1, 2, 3, 4 | 30 mm | 282 × 777 × 648 mm | 35 kg |
| Within ±10 mm of Calibration Plane | (5.9 + L/60) µm 1, 2, 3, 4 | ||||
1 Within operating temperature of 20.0℃ ± 1℃ at the focal point position.
2 L is in mm.
3 Up to lengths of 75 mm.
4 Using Micro-Vu Calibration Artifact
