Specification
| Machine Models | Vertex 261 | Vertex 341 | Vertex 342 |
|---|---|---|---|
| Measurement Volume (mm) | 250 × 160 × 160 | 315 × 315 × 160 | 315 × 315 × 250 |
| XY Accuracy (μm) | 2.2+L/190 1, 2, 3 | 2.5+L/180 1, 2, 3 | 2.5+L/180 1, 2, 3 |
| Stage Capacity (kg) | 10 | 20 | 20 |
| Machine Dimensions (mm) | 755 × 1130 × 1075 | 900 × 1410 × 1065 | 900 × 1410 × 1245 |
| Machine Weight (kg) | 100 | 150 | 160 |
| X Max Speed | 250 mm/s | ||
| Y Max Speed | 250 mm/s | ||
| Z Max Speed | 100 mm/s | ||
| Linear Resolution | 0.1 μm | ||
Stage capacity is based on an evenly distributed load.
1 Within operating temperature of 20.0℃ ± 1℃ at the focal point position.
2 L is in mm.
3 Using Micro-Vu Calibration Artifact
