Specification
VF1
| Measurement Capacity | XY Accuracy | Measurement Range | Machine Weight | Machine Dimensions | |
|---|---|---|---|---|---|
| 69.3 x 49.6 mm | At Calibration Plane | 5.0 µm 1, 2, 3, 4 | 30 mm | 20 KG | 187 × 394 × 464 mm |
| Within ±10 mm of Calibration Plane | (5.9 + L/60) µm 1, 2, 3, 4 | ||||
1 Within operating temperature of 20.0℃ ± 1℃ at the focal point position.
2 L is in mm.
3 Up to lengths of 75 mm.
4 Using Micro-Vu Calibration Artifact
VF7
| Image Magnification | Measurement Capacity | XY Accuracy | Measurement Range | Stage Position Range | Stage Weight Capacity | Machine Dimensions |
|---|---|---|---|---|---|---|
| Low | 69.3 x 49.6 mm | (4.5 + L/200) µm 1, 2, 3 | 30 mm | 49 mm | 3 kg | 290 × 453 × 883 mm |
| High | 17.3 x 12.4 mm | 3.7 µm 1, 2, 3 | 3 mm |
1 Within operating temperature of 20.0℃ ± 1℃ at the focal point position.
2 L is in mm.
3 Using Micro-Vu Calibration Artifact
